Determination of Ar/O2 Gas Flow Rate Dependent Acoustic Impedance Values of Unannealed CZO Thin Films via Scanning Acoustic Microscopy


Güzelçimen F. , Karapınar Y., Parlak M., Tanören B., Ünlü M. B.

in: INSAC Academic Developments on Natural and Engineering Sciences, Sadık Alper Yıldızel, Editor, Duvar International Publishing, Ankara, pp.163-173, 2021

  • Publication Type: Book Chapter / Chapter Research Book
  • Publication Date: 2021
  • Publisher: Duvar International Publishing
  • City: Ankara
  • Page Numbers: pp.163-173
  • Editors: Sadık Alper Yıldızel, Editor