Spectroscopic Studies of the Effect of Sputter Etching on beta FeSi2 Film Growth

TATAR B., KUTLU K., ÜRGEN M. K.

26. International Physics Conferece, Bodrum, Turkey, 24 - 27 September 2009

  • Publication Type: Conference Paper
  • City: Bodrum
  • Country: Turkey
  • Istanbul University Affiliated: Yes