Dielectric properties of sol-gel derived Ta2O5 thin films

YILDIRIM S., Ulutas K., DEGER D., Zayim E., Türhan İ.

Vacuum, vol.77, no.3, pp.329-335, 2005 (SCI-Expanded, Scopus)

  • Publication Type: Article / Article
  • Volume: 77 Issue: 3
  • Publication Date: 2005
  • Doi Number: 10.1016/j.vacuum.2004.12.002
  • Journal Name: Vacuum
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.329-335
  • Istanbul University Affiliated: Yes