Assisted cubic to hexagonal phase transition in GeSbTe thin films on silicon nitride

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Cil K., ZHU Y., LI J., LAM C. H., Silva H.

THIN SOLID FILMS, vol.536, pp.216-219, 2013 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 536
  • Publication Date: 2013
  • Doi Number: 10.1016/j.tsf.2013.03.087
  • Journal Name: THIN SOLID FILMS
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.216-219
  • Istanbul University Affiliated: No


The amorphous to face-centered cubic (fcc) and fcc to hexagonal close-packed (hcp) crystallization temperatures of GeSbTe thin films on underlying silicon nitride and silicon dioxide films were studied through slow(1 K/min) resistance versus temperature measurements. The amorphous to fcc phase transition is observed at similar to 170 degrees C for both cases but the fcc to hcp phase transition temperature for GeSbTe films on silicon nitride is observed to be similar to 80 degrees C lower than for GeSbTe films on silicon dioxide, possibly due to the hexagonal symmetry of silicon nitride. (C) 2013 Elsevier B.V. All rights reserved.