Evaluation of the optoelectronic properties and corrosion behavior of Al2O3-doped ZnO films prepared by dc pulsed magnetron sputtering

Zubizarreta, C.; Berasategui, E.; Bayon, R.; Galindo, R.; Barros, R.; Gaspar, D.; Nunes, D.; Calmeiro, T.; Martins, R.; Fortunato, E.; Barriga, J.

doi:10.1088/0022-3727/47/48/485501

Evaluation of the optoelectronic properties and corrosion behavior of Al2O3-doped ZnO films prepared by dc pulsed magnetron sputtering

Atıf İçin Kopyala

Zubizarreta C., Berasategui E. G., Bayon R., Galindo R. E., Barros R., Gaspar D., ...Daha Fazla

JOURNAL OF PHYSICS D-APPLIED PHYSICS, cilt.47, sa.48, 2014 (SCI-Expanded)

Yayın Türü: Makale / Tam Makale
Cilt numarası: 47 Sayı: 48
Basım Tarihi: 2014
Doi Numarası: 10.1088/0022-3727/47/48/485501
Dergi Adı: JOURNAL OF PHYSICS D-APPLIED PHYSICS
Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
Anahtar Kelimeler: AZO, PVD, electrochemical impedance, polarization, optoelectronics, OXIDE THIN-FILMS, ZINC-OXIDE, OPTICAL-PROPERTIES, AL FILMS, TRANSPARENT, DEPOSITION, THICKNESSES, TEMPERATURE, PLASMA, RF
İstanbul Üniversitesi Adresli: Hayır

Özet

The main requirements for transparent conducting oxide (TCO) films acting as electrodes are a high transmission rate in the visible spectral region and low resistivity. However, in many cases, tolerance to temperature and humidity exposure is also an important requirement to be fulfilled by the TCOs to assure proper operation and durability. Besides improving current encapsulation methods, the corrosion resistance of the developed TCOs must also be enhanced to warrant the performance of optoelectronic devices.