Evaluation of the optoelectronic properties and corrosion behavior of Al2O3-doped ZnO films prepared by dc pulsed magnetron sputtering


Zubizarreta C., Berasategui E. G. , Bayon R., Galindo R. E. , Barros R., Gaspar D., ...More

JOURNAL OF PHYSICS D-APPLIED PHYSICS, vol.47, no.48, 2014 (Journal Indexed in SCI) identifier

  • Publication Type: Article / Article
  • Volume: 47 Issue: 48
  • Publication Date: 2014
  • Doi Number: 10.1088/0022-3727/47/48/485501
  • Journal Name: JOURNAL OF PHYSICS D-APPLIED PHYSICS
  • Journal Indexes: Science Citation Index Expanded, Scopus
  • Keywords: AZO, PVD, electrochemical impedance, polarization, optoelectronics, OXIDE THIN-FILMS, ZINC-OXIDE, OPTICAL-PROPERTIES, AL FILMS, TRANSPARENT, DEPOSITION, THICKNESSES, TEMPERATURE, PLASMA, RF

Abstract

The main requirements for transparent conducting oxide (TCO) films acting as electrodes are a high transmission rate in the visible spectral region and low resistivity. However, in many cases, tolerance to temperature and humidity exposure is also an important requirement to be fulfilled by the TCOs to assure proper operation and durability. Besides improving current encapsulation methods, the corrosion resistance of the developed TCOs must also be enhanced to warrant the performance of optoelectronic devices.