TEXTURE ANALYSES OF CHEMICALLY VAPOR-DEPOSITED COATINGS IN THE TI-C-N SYSTEM BY WIDE FILM DEBYE-SCHERRER X-RAY-DIFFRACTION TECHNIQUE


EROĞLU Ş. , Gallois B.

JOURNAL DE PHYSIQUE IV, cilt.3, ss.177-182, 1993 (SCI İndekslerine Giren Dergi) identifier identifier

  • Cilt numarası: 3
  • Basım Tarihi: 1993
  • Doi Numarası: 10.1051/jp4:1993322
  • Dergi Adı: JOURNAL DE PHYSIQUE IV
  • Sayfa Sayıları: ss.177-182

Özet

Texture analyses were performed on the chemically vapor deposited monolithic TiN, TiC, TiC(x)N(y) coatings and graded TiN/TiC coatings by wide film Debye-Scherrer X-ray diffraction technique. The preferred orientations of the coatings were investigated as a function of coating thickness and input gas composition. The growth of TiN and TiC coatings was initiated as randomly oriented crystallites which subsequently grew into large columnar grains with a [110] preferred orientation. The textures of TiC coatings with the same thickness changed from the [110] orientation to the [100] orientation with decreasing hydrogen concentration in the gas phase. TiC(x)N(y) coatings exhibited a preferred orientation of [111] up to the CH4/CH4+N2 ratio of 0.14 above which a strong [100] texture developed. The texture analyses on the graded TiN/TiC coatings showed that the TiC top layers were oriented in a [100] direction perpendicular to the sample surface.