International Two-Dimensional Nanomaterials Conference , İstanbul, Turkey, 25 - 27 May 2022, pp.1
Focused ion beam (FIB) has shown great potential in material/surface modification and defect engineering in 2D materials more recently, especially within the transition metal dichalcogenides (TMDCs) family, with the aim to tailor their optical and electronic properties. On the other hand, UV-ozone (UV-O3) exposure is another powerful technique for a wide range of applications such as controllable doping, layer by layer thinning, etc. on 2D materials. A better understanding and control of defects is important to move forward in the field of defect engineering in TMDCs. In this study, we discussed fabrication details for controllable defect engineering, and the effect of ion beam and UV-O3 exposure on the optical and electrical properties of 2D materials.