Chemical vapour deposition of pyrolytic carbon from impinging jets


EROĞLU Ş. , Gallois B.

CERAMICS INTERNATIONAL, vol.22, no.6, pp.483-487, 1996 (Journal Indexed in SCI) identifier identifier

  • Publication Type: Article / Article
  • Volume: 22 Issue: 6
  • Publication Date: 1996
  • Doi Number: 10.1016/0272-8842(95)00121-2
  • Title of Journal : CERAMICS INTERNATIONAL
  • Page Numbers: pp.483-487

Abstract

Pyrolytic carbon coatings were deposited on a graphite substrate by chemical vapour deposition technique from impinging jets of ethylene gas. The growth and structure of the coatings were investigated as a function of gas flow velocity. The deposition rate of the coatings increased linearly with the square root of gas velocity or flow rate of ethylene. This behaviour was explained by a mass-transport theory. The coatings exhibited cone-like morphology at low gas velocities and cauliflower-like morphology at high gas velocities. Textural analyses revealed that all the coatings were preferentially oriented in the < 001 > direction perpendicular to the substrate. (C) 1996 Elsevier Science Limited and Techna S.r.l.