The thickness dependence of dielectric properties of amorphous Al2O3 films

Değer D., Ulutaş H. K.

International Conference of Atomic Collision Solids, Paris, France, 1 - 04 August 2001, pp.150

  • Publication Type: Conference Paper / Full Text
  • City: Paris
  • Country: France
  • Page Numbers: pp.150
  • Istanbul University Affiliated: Yes